Our four point probe is a full manual station use to measure for a range of applications such as the following:

  • Sheet Resistivity
  • Slice Resistivity
  • Doping Quality
  • Metalization Thickness
  • P/N Typing
  • V/I Measurement
fpp SR-4

  • Chuck: 8″
  • Lever Driven Up/Down
  • Head Up/Down: 16mm
  • Probing Z Resolution: 10um
  • Probe Pin Material: Tungsten Carbide
  • Probe Pin Spacing: 40mil, 50mil, 62.5mil
  • Probe Pin Spring: 45grams, 85grams, 180grams
  • Probe Pin Diameter: 40.6um
KRS-4 KSR-4

  • Chuck Size: ~ 12″
  • Square/Round Chuck Selectable
  • Z Up/Down: 30mm
  • Z Resolution: 20um
  • 1ea 4 Point Head