Everbeing’s four point probe uses the four co-linear probes on contact to determine the sheet resistance of your wafer or thin films. The method uses the four terminal sensing or “Kelvin” approach by using separate junctions for voltage and current instead of through the same connection. As a result, internal resistance, lead or contact resistance is reduced and lower ohm values can be read.

This four point probe stand can also be used for the following applications:

  • Sheet Resistivity
  • Slice Resistivity
  • Doping Quality
  • Metalization Thickness
  • P/N Typing
  • V/I Measurement

Four Point Probe Head

Four co-linear probes with individual spring actuation allows good contact for probing even or uneven surfaces


  • Chuck: 8″
  • Lever Driven Up/Down
  • Head Up/Down: 16mm
  • Probing Z Resolution: 10um
  • Probe Pin Material: Tungsten Carbide
  • Probe Pin Spacing: 40mil, 50mil, 62.5mil
  • Probe Pin Spring: 45grams, 85grams, 180grams
  • Probe Pin Diameter: 40.6um

  • Chuck Size: ~ 12″
  • Square/Round Chuck Selectable
  • Z Up/Down: 30mm
  • Z Resolution: 20um
  • 1ea 4 Point Head