Probe Station

A probe station is an interface tool to measure the electrical characteristics of your microelectronic device. For example, if you are unable to see the inputs and outputs of your DUT precisely with the naked eye, a probe station is what you need to perform measurements, whether it be a wafer, glass, MEMS etc. However, the station requires a combination of a microscope and micropositioners to facilitate the experiment. When integrated, users can accurately make contact to their devices with probes and measure with electronic meters to see your results. 

Everbeing’s offerings are available to suit your every application need, and using our modular solution approach, we can customize a single station to combine your applications into a single package. For instance, you may require high frequency probing with probe card integration

Probing view using Everbeing EB-6 probe station with 5 µm probe tips

Narrowing your Requirements

Some details you would need to identify are:

  • What is my device size and probing size?
  • What type of data am I trying to measure?
  • Do I need my DUT’s to be heated?
  • Do I need high frequency (RF) probing? (For more information on RF probes, please check out GGB Picoprobes at

Understanding Our Stations

A lot to probing starts from these questions, and the chart below will help to filter the station type you would be looking for.

Chuck StageChuck Up/DownMicroscope StagePlaten LiftPlaten Fine Adjustment
EB-Series vvv
BD-Series vvvv

In addition to the above, there are mmW probe stations in their own category, as well as controlled environment probe stations. These two types are more specific and offers all the features you need for these applications. For more information, please refer to the EB mmW Probe Station page or CG-196 page.

Don’t see one that fits? Consult with us to figure out your requirements by sending us a question. Let us know more about your application to see if you need additional customizations to your own manual probe station.