The Chamber Plus probe station offers a sealed environment for an oxygen-free environment and double as a Faraday cage enclosure for extreme limits for probing. While the DUT is enclosed within the chamber, all probing operations such as chuck stage movement, micropositioning, are still readily available. With this product you can achieve the following into your test:

  • Temperature range within -60˚C to 400˚C (Optional 500˚C from RT)
  • Low leakage currents down to 20 fA
  • RF probing up to 67 GHz or higher depending on VNA

We partner with the following companies for some applications:

For more information please download the following catalogue or contact our sales team.

EB Chamber Plus Probe Station CatalogueDownload